Typical Ultrapure Water System 

Ultrapure/DI water is used in large volumes throughout the semiconductor manufacturing process. The specifications for the DI water quality have become increasingly stringent over the years and the filter technology has evolved to meet these requirements.

 

 

Item Application Part Number
1、
Pre-RO Filtration
MBC,GUF,HPP
2、
Prefiltration
HPP,APS
3、
Final Filtration
APS

 


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